SURFACE SCANNING PROBES

SISTEMA SURFACE SCAN PROBES PAIRED TO OPTICAL PARTICLE COUNTERS

In the semiconductor industry, where even microscopic particles can affect yield, detecting and measuring surface contamination is critical. Sistema-MK probes extend the capabilities of established airborne particle counting systems, transforming them into comprehensive tools for surface cleanliness monitoring across production facilities.

Engineered and manufactured in Germany, these surface scanning probes deliver exceptional reliability and accuracy. Specifically designed for compatibility with leading optical particle counters such as Lighthouse Solair and TSI Aerotrak, they enable precise assessments of critical surfaces in cleanroom environments.

With robust construction, high precision, and long service life, Sistema-MK probes combine German engineering excellence with seamless integration into existing monitoring setups. By providing standardized surface cleanliness verification alongside airborne monitoring, they enhance cleanroom assurance and help semiconductor manufacturers worldwide meet the strictest contamination control standards.

Strengthening Contamination Control in Semiconductor Manufacturing

In semiconductor production, yield depends on the relentless control of microscopic particles. Even submicron contamination on wafers, tools, or substrates can disrupt processes, lower device reliability, and compromise output. Cleanrooms are designed to minimize airborne particles, and optical particle counters are widely deployed to measure air cleanliness in line with international standards such as ISO 14644-1. However, airborne monitoring alone does not tell the full story. Particles that escape detection often settle on critical surfaces, posing hidden risks that can only be identified through direct surface assessment.

Bridging the Gap: Surface Scanning Probes being seamlessly with widely used optical particle counters

Sistema Surface Scanning Probes (SSP) close this monitoring gap by extending the capability of existing airborne particle counters. By pairing seamlessly with widely used optical particle counters, SSPs transform these instruments into dual-purpose tools, capable of both airborne and surface contamination analysis. This integration allows fabs to leverage their existing monitoring infrastructure while adding an entirely new dimension of contamination assurance.

Sistema Surface Scanning Probes (SSP) operate by drawing particles from a surface into the optical counter under controlled conditions, enabling quantifiable and repeatable assessments of surface cleanliness. This approach complements airborne data, producing a more complete contamination profile across critical environments.

Engineering Precision and Reliability

Manufactured in Germany, Sistema SSPs embody engineering precision and durability. Their robust construction ensures compatibility with demanding cleanroom environments, while high sensitivity and long service life deliver consistent results over time. Designed specifically for seamless integration, they fit easily into existing workflows without requiring new training programs or separate data systems.

By aligning with ISO 14644-9, which outlines methods for surface cleanliness assessment, SSPs provide standardized data suitable for audits, process qualification, and continuous improvement programs. This ensures that results are not only precise but also traceable and comparable across facilities worldwide.

Benefits for Semiconductor Manufacturers

Deploying SSPs offers semiconductor fabs a range of benefits:

• Comprehensive contamination assurance by combining airborne and surface monitoring.
• Cost-effective use of existing particle counters, avoiding the need for separate surface analysis platforms.
• Standardized, traceable cleanliness metrics, enabling long-term trend analysis and compliance with international standards.
• German-engineered robustness, ensuring accuracy, repeatability, and longevity even under frequent use.
• Global applicability, as SSPs integrate with the industry’s most common optical counters, supporting fabs in all regions.

Conclusion

As device geometries shrink and contamination sensitivity rises, semiconductor manufacturers cannot rely on airborne monitoring alone. Sistema Surface Scanning Probes (SSP), when paired with standard optical particle counters, provide a proven solution for addressing this challenge. By enabling reliable, standardized measurement of surface cleanliness alongside airborne monitoring, SSPs help manufacturers worldwide achieve the highest levels of contamination control—and the yields demanded by advanced semiconductor production.

References

ISO 14644-1:2015 – Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration. International Organization for Standardization.

ISO 14644-9:2012 – Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration. International Organization for Standardization.